山武氣體質(zhì)量流量計(jì)CMS系列是使用了山武獨(dú)自開發(fā)的超微小流速傳感器—UF（microflow）傳感器的新一代氣體質(zhì)量流量計(jì)。這一傳感器是一個(gè)芯片型感熱式質(zhì)量流量傳感器，直接安裝于流體管路中，可以測(cè)量極低流速的流體流量，使CMS具有100:1高測(cè)量比。UF傳感器無以倫比的卓越性能，加上獨(dú)自開發(fā)的整流機(jī)構(gòu)，使得本產(chǎn)品以相當(dāng)于浮子式流量計(jì)的價(jià)格實(shí)現(xiàn)了高精度、高分辨率、寬測(cè)量范圍的氣體質(zhì)量流量測(cè)量。 CMS氣體流量計(jì)特點(diǎn)： 1：由于采用直接質(zhì)量流量測(cè)量，因此實(shí)現(xiàn)了不受溫度、壓力變動(dòng)影響的**測(cè)量

2：實(shí)現(xiàn)了3%RD的高精度，0.5%FS的重復(fù)性、100:1的高量程能力，同時(shí)也滿足了低價(jià)格的要求

3：CMS具有瞬時(shí)、累計(jì)流量顯示、模擬輸出、累計(jì)脈沖輸出、事件輸出2點(diǎn)、模擬輸出定標(biāo)功能以及RS-485通信功能

4：采用獨(dú)特的管內(nèi)壁測(cè)量方式，實(shí)現(xiàn)了500PA（CMS200一次壓力49KPA）的低壓力損失.

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