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點(diǎn)擊圖片查看原圖Model Number: ON-BOARD 10 CRYOPUMP Part Number: 8116148G003 CE Marked:Yes The Network Module's Serial Number Tag Reads:
Model Number: ON-BOARD MODULE Part Number: 8113103G005 Link to the Datasheet: CTI On-Board Series Cryopump Datasheet Link to the Cryopump
Manual: CTI On-Board Cryopump Manual Link to the FastRegen Module Manual: CTI On-Board Cryopump Manual On-Board Cryopumps:
- CTI-Cryogenics' pioneering cryopumps with fully integrated controls and supporting peripherals speeds integration and system operation
- Consistent process performance
- Higher tool productivity via significantly increased cryopump uptime
- Regenerates in half to one-third the time of a typical Cryo-Torr? cryopump application
- Fast Regen? capability extends cryopump performance between regenerations
- Simultaneous regeneration capability, enabled by networking your cryopumps, speeds overall system regeneration, increasing tool uptime
- GOLDLink? compatible for productivity protection 24/7, worldwide
- Backed by legendary Helix service and support, worldwide Description: On-Board cryogenic vacuum pumps incorporate embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability. On-Board solutions include sophisticated software and easy-to-use graphical user interfaces to significantly improve the performance and operation of the cryopump. Today, the On-Board Cryopump is the standard of the world for reliability and performance. Specifications: Pumping Speeds: Water Vapor: 9,000 liters/sec Air: 3,000 liters/sec Hydrogen: 5,000 liters/sec Argon: 2,500 liters/sec Capacity: Argon: 2,000 std. liter Hydrogen (5 x 10-6 Torr): 24 std. liter Nominal Regeneration Time (Cold to Cold): First & Second Stage: 2.5 hours Second Stage:
