Aisin's cryopumps consist of a separatecompressor unit and a GM refrigerator which has an improved va**emechanism.

日本愛信低溫泵系統(tǒng)包括兩個獨立分開的壓縮機和GM原理制冷機。

?

?High Productivity **

?

High Productivity has been achieved by developing a high-outputrefrigerator with a long regeneration cycle, high throughputoperation, and reduced cool-down time.

?

?通過研發(fā)出來的**制冷機，實現(xiàn)了**：很長的再生周期，高產(chǎn)量，較短的降溫時間。

?

?Simple Maintenance維護簡便

?

?Maintenance has been simplified. Va**es do not requireadjustment. In addition to va**es, some components do not requireadjustment.

?

?維修簡化。（進**）閥不需要調(diào)整，其它一些組件也是如此（編者注：比如深度）。

?

?High-Performance Compressor Unit**（*氣）壓縮機

?

?The cryopump utilizes a high-capacity compressor and ahigh-performance oil separator to acheive long-term stablerefrigeration output and long life for theadsorber.低溫泵利用**（*氣）壓縮機和**油氣分離器，獲得了持久穩(wěn)定的制冷（功率）輸出，同時也提高了吸附器的使用期限。

?

?High Reliability高可靠性

?

?Stable discharge characteristics have been achieved byusing highly reliable seals, drive units, and va**e mechanisms andby optimizing the panelshape.通過應(yīng)用超高穩(wěn)定的密封圈（編者注：尤其是一級蓄冷器密封），驅(qū)動單元，“進**”閥機構(gòu)，和優(yōu)化面板形狀，獲得了穩(wěn)定的排氣（或者說“抽氣”）性能。

?

?Low-Vibration Pump Unit低振動

?

Uses a small, special three-phase motor, reduces vibrations to1/40 of the convectional poduct( two-phases motor).應(yīng)用了小型三相電機，其振動只有傳統(tǒng)電機（兩相電機）的1/40。（編者注：三相電機是各個廠家的發(fā)展趨勢，顯著優(yōu)勢是振動?。?/p>

?

Applications應(yīng)用

?

Ion implanter for semiconductors, liquid crystal, vapordeposition equipment and so on. 半導(dǎo)體的離子注入、液晶、氣相沉積（編者注：蒸發(fā)或濺射）。