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Brooks - CTI Cryogenics
CTI-Cryogenics is the global leader in cryogenic high-vacuum technology. CTI builds a broad array of compressors, cryopumps, and cryopump systems design ed to deliver exceptional performance, reliability, and productivity. Product line includes:
On Board Cryopumps
- CTI-Cryogenics'''' pioneering cryopumps with fully integrated controls and supporting peripherals speeds integration and system operation
- Consistent process performance
- Higher tool productivity via significantly increased cryopump uptime
- Regenerates in half to one-third the time of a typical Cryo-Torr? cryopump application
- Fast Regen capability extends cryopump performance between regenerations
- Simultaneous regeneration capability, enabled by netwo*ng your cryopumps, speeds overall system regeneration, increasing tool uptime
- GOLDlink? compatible for productivity protection 24/7, worldwide
- Backed by legendary Helix service and support, worldwide
On-Board Cryo-Pump Model | 4F | 8 | 8F | 10 | 10F | 400 |
Pumping Speeds - liters/sec. | ||||||
Water Vapor | 1,100 | 4,000 | 4,000 | 9,000 | 9,500 | 17,500 |
Air | 370 | 1,500 | 1,500 | 3,000 |
| 6,000 |
Hydrogen | 370 | 2,500 | 2,200 | 5,000 |
| 12,000 |
Argon | 310 | 1,200 | 1,200 | 2,500 |
| 5,000 |
Capacity - std. liter | ||||||
Argon | 210 | 1,000 | 1,000 | 2,000 |
| 2,500 |
Hydrogen (5x10-6 Torr) | 3 | 17 | 12 | 24 | 24 | 42 |
Nominal Regeneration Time (cold to cold) | ||||||
First & Second Stage | 75 min. | 2.5 hrs | 2.5 hrs | 2.5 hrs | 2.5 hrs | 3 hrs |
Second Stage | <1 hr | <1 hr | <1 hr | <1 hr | <1 hr | <1.5 hrs |
On-Board Waterpumps
- 50% to 75% reduction in time to base pressure
- Higher yields through reduced water vapor and lower contamination
- Temperature control for selective water vapor pumping. No gate valve required
- Low-cost installation and operation
- Advanced On-Board control system for process optimization and monitoring, predictive maintenance, network pump management, and ease of use
- Compatibility with other On-Board pumps
Cryo-Torr Cryopumps
- CTI Cryogenics’ original cryogenic high-vacuum pump
- Dependable bottom-line performance
- Add your own customized controls and supporting peripherals
- Clean, reliable high speed pumping for critical vacuum process applications
- Fast maintenance and low operating costs
Cryo-Torr Cryopump Model | 8 | >8F | >10 |
Pumping Speeds - liters/sec. | |||
Water Vapor | 4,000 | 4,000 | 9,000 |
Air | 1,500 | 1,500 | 3,000 |
Hydrogen | 2,500 | 2,200 | 5,000 |
Argon | 1,200 | 1,200 | 2,500 |
Capacity - std. liter | |||
Argon | 1,000 | 1,000 | 2,000 |
Hydrogen (5x10-6 Torr) | 12 | 8 | 24 |
Cryo-Torr 20HP High Performance Cryopump
- Extreme high pumping speeds insure faster pump down times
- New cryogenic refrigerator design allows for high temperature operation and greater vacuum reliability
- Oil-free operation eliminates high LN2 costs while providing better vacuum quality
- Fast and easy maintenance
- Perfect solution for metal deposition, optical coating, space simulation and other applications, such as, flat panel display manufacturing
Compressors
8200 Compressor:
- Optimum performance with On-Board Cryopumps, Waterpumps and Cryo-Torr Cryopumps
- Supports all pumps up to 8 inches
- Designed for flexibility
9600 Compressor:
- Designed for upscale life, high reliability, and easy use
- Outstanding performance with all Cryo-Torr Cryopumps, On-Board Cryopumps, WAterpumps, and TurboPlus Vacuum Pumps
- Supports both singe and grouped pump configuration and is compatible with new and existing CTI Cryogenics pumping installations
9700A Compressor:
- based on the 9600 Compressor platform
- Incrased helium output
- Ideal for operating multiple cryopumps
Cryodyne Refrigerators
- Made up of a family of two stage, closed cycle helium refrigeration systems based on the Gifford-McMahon thermodynamic cycle
- Offers usable heat lift from <10K to >80L for a variety of research and commercial applications
Refrigeration system consists of a refrigerator assembly, compressor assembly and customized installation kit, including, flexible interconnecting gas lines and refrigerator cable ranging from the standard 10-foot separation length up to 300-foot lengths.
